Robert Kirchner

Robert Kirchner

Technische Universität Dresden - Dresden / Germany
Engineering & Technology / Electrical & Electronic Engineering
AD Scientific Index ID: 1780629
Dresden University of Technology
person_outline Robert Kirchner's MOST POPULAR ARTICLES
1-) Thermal reflow of polymers for innovative and smart 3D structures: A review Materials Science in Semiconductor Processing 92, 58-72, 2019
2-) Novel 3D micro-and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers Nano Convergence 1 (1), 7, 2014
3-) High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps Journal of Vacuum Science & Technology B 34 (6), 2016
4-) ZEP520A—A resist for electron-beam grayscale lithography and thermal reflow Microelectronic Engineering 153, 71-76, 2016
5-) Energy-based thermal reflow simulation for 3D polymer shape prediction using Surface Evolver Journal of Micromechanics and Microengineering 24 (5), 055010, 2014