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Sangjun Park
Lam Research Corp. - Fremont / United States
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AD Scientific Index ID: 5597119
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Sangjun Park's MOST POPULAR ARTICLES
1-)
The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal siliconS Lee, S Park, DI ChoMicroelectromechanical Systems, Journal of 8 (4), 409-416, 19991751999
2-)
Surface/bulk micromachined single-crystalline-silicon micro-gyroscopeS Lee, S Park, J Kim, S Lee, DI ChoMicroelectromechanical Systems, Journal of 9 (4), 557-567, 20001532000
3-)
Isolation in micromachined single crystal silicon using deep trench insulationD Cho, S Lee, S Park, S LeeUS Patent 6,472,290, 2002462002
4-)
A novel 3D process for single-crystal silicon micro-probe structuresS Park, B Kim, J Kim, S Paik, BD Choi, I Jung, K ChunJournal of micromechanics and microengineering 12 (5), 650, 2002392002
5-)
Surface/bulk micromachining (SBM) process and deep trench oxide isolation method for MEMSS Lee, S Park, D Cho, Y OhElectron Devices Meeting, 1999. IEDM\'99. Technical Digest. International …, 1999341999
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