Sarathi Roy

Sarathi Roy

ASML Holding - / Netherlands
Natural Sciences / Physics
AD Scientific Index ID: 4965992
person_outline Sarathi Roy's MOST POPULAR ARTICLES
1-) Radially Polarized Light for Detection and Nanolocalization of Dielectric Particles on a Planar Substrate S. Roy, K. Ushakova, Q. van den Berg, S. F. Pereira, H. P. Urbach Physical Review Letters 114 (103903), 2015 742015
2-) Reconstruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier scatterometry N Kumar, P Petrik, GKP Ramanandan, O El Gawhary, S Roy, SF Pereira, ... Optics express 22 (20), 24678-24688, 2014 382014
3-) Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem S Roy, N Kumar, SF Pereira, HP Urbach Journal of Optics 15 (7), 075707, 2013 262013
4-) Coherent Fourier scatterometry for detection of nanometer-sized particles on a planar substrate surfaceS Roy, AC Assafrao, SF Pereira, HP UrbachOptics express 22 (11), 13250-13262, 2014282014
5-) Coherent Fourier scatterometry: tool for improved sensitivity in semiconductor metrologyN Kumar, O El Gawhary, S Roy, VG Kutchoukov, SF Pereira, W Coene, ...Metrology, Inspection, and Process Control for Microlithography XXVI 8324 …, 2012232012