Seidel Helmut

Seidel Helmut

Universität des Saarlandes - Saarbrücken / Germany
Engineering & Technology / Mechatronics Engineering
AD Scientific Index ID: 1783232
Saarland University
person_outline Seidel Helmut's MOST POPULAR ARTICLES
1-) Anisotropic etching of cristalline silicon in alkaline solutions. II. Influence of dopants J. Electrochem. Soc 137 (11), 3626-3632, 1990
2-) Micromechanical structure US Patent 5,252,294, 1993
3-) The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films Materials Science and Engineering: B 172 (3), 253-258, 2010
4-) Resonant accelerometer with self-test Sensors and Actuators A: Physical 92 (1-3), 161-167, 2001
5-) Resonant accelerometer with self-testM Aikele, K Bauer, W Ficker, F Neubauer, U Prechtel, J Schalk, H SeidelSensors and Actuators A: Physical 92 (1-3), 161-167, 20011852001