Seiichi Hata

Seiichi Hata

Nagoya University - Nagoya / Japan
Others
AD Scientific Index ID: 424095
名古屋大学
person_outline Seiichi Hata's MOST POPULAR ARTICLES
1-) Thin film-structure and a method for producing the sameA Shimokohbe, S HataUS Patent 6,759,261, 20042342004
2-) Thermal, mechanical and electrical properties of Pd-based thin-film metallic glassY Liu, S Hata, K Wada, A ShimokohbeJapanese Journal of Applied Physics 40 (9R), 5382, 20011412001
3-) A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallelKB Choi, JJ Lee, S HataSensors and Actuators A: Physical 161 (1-2), 173-181, 20101352010
4-) Microforming of three-dimensional microstructures from thin-film metallic glassHW Jeong, S Hata, A ShimokohbeJournal of microelectromechanical systems 12 (1), 42-52, 20031152003
5-) A MEMS conical spring actuator arrayT Fukushige, S Hata, A ShimokohbeJournal of Microelectromechanical Systems 14 (2), 243-253, 20051142005