Shahid Rauf

Shahid Rauf

Applied Materials, Inc. - Santa Clara / United States
Others
AD Scientific Index ID: 4375740
person_outline Shahid Rauf's MOST POPULAR ARTICLES
1-) The 2017 Plasma Roadmap: Low temperature plasma science and technologyI Adamovich, SD Baalrud, A Bogaerts, PJ Bruggeman, M Cappelli, ...Journal of Physics D: Applied Physics 50 (32), 323001, 20177652017
2-) The 2012 plasma roadmapS Samukawa, M Hori, S Rauf, K Tachibana, P Bruggeman, G Kroesen, ...Journal of Physics D: Applied Physics 45 (25), 253001, 20127052012
3-) Dual mode inductively coupled plasma reactor with adjustable phase coil assemblyS Banna, VN Todorow, KS Collins, A Nguyen, MJ Salinas, Z Chen, ...US Patent App. 12/821,636, 20113152011
4-) Etch method in the manufacture of an integrated circuitTG Sparks, R ShahidUS Patent App. 12/377,348, 20114912011
5-) Symmetric plasma process chamberJD Carducci, H Tavassoli, A Balakrishna, Z Chen, A Nguyen, ...US Patent 9,741,546, 20174082017