Sheng-Yung Chen

Sheng-Yung Chen

National Taiwan University - Taipei / Taiwan
Others
AD Scientific Index ID: 6097896
國立台灣大學
person_outline Sheng-Yung Chen's MOST POPULAR ARTICLES
1-) Inter-vehicle communication and warning apparatusYH Cheng, YY Chen, CS Yang, SY ChenUS Patent 7,315,239, 20081152008
2-) Manufacturability Analysis of a Micro-Electro-Mechanical Systems–Based Electron-Optical System Design for Direct-Write LithographySY Chen, SC Chen, HH Chen, KY Tsai, HH PanJapanese Journal of Applied Physics 49 (6S), 06GE05, 2010112010
3-) In situ beam drift detection using a two-dimensional electron-beam position monitoring system for multiple-electron-beam–direct-write lithographySY Chen, KY Tsai, PCW Ng, HT Ng, CH Liu, YT Shen, CH Kuan, YY Chen, ...Journal of Vacuum Science & Technology B 29 (4), 201192011
4-) Silicon photodiodes for electron beam position and drift detection in scanning electron microscopy and electron beam lithography systemYH Kuo, CJ Wu, JY Yen, SY Chen, KY Tsai, YY ChenNuclear Instruments and Methods in Physics Research Section A: Accelerators …, 201182011
5-) A single-element transducer with nonuniform thickness for high-frequency broadband applicationsJH Liu, SY Chen, PC LiIEEE transactions on ultrasonics, ferroelectrics, and frequency control 56 …, 200972009