Shibesh Dutta

Shibesh Dutta

ASM International - Almere / Netherlands
Others
AD Scientific Index ID: 4524013
person_outline Shibesh Dutta's MOST POPULAR ARTICLES
1-) Thickness dependence of the resistivity of platinum-group metal thin films S Dutta, K Sankaran, K Moors, G Pourtois, SV Elshocht, J Bömmels, ... Journal of Applied Physics 122 (2), 2017 1322017
2-) Atomic Layer Deposition of Ruthenium with TiN interface for sub-10 nm advanced interconnects beyond Copper LG Wen, P Roussel, OV Pedreira, B Briggs, B Groven, S Dutta, ... ACS Applied Materials & Interfaces 8 (39), 26119-26125, 2016 752016
3-) Highly Scaled Ruthenium Interconnects S Dutta, S Kundu, A Gupta, G Jamieson, JFG Granados, J Bömmels, ... IEEE Electron Device Letters 38 (7), 949-951, 2017 662017
4-) Ruthenium metallization for advanced interconnectsLG Wen, C Adelmann, OV Pedreira, S Dutta, M Popovici, B Briggs, ...2016 IEEE International Interconnect Technology Conference/Advanced …, 2016862016
5-) Sub-100 nm 2 Cobalt InterconnectsS Dutta, S Beyne, A Gupta, S Kundu, S Van Elshocht, G Jamieson, ...IEEE Electron Device Letters 39 (5), 731 - 734, 2018722018