Steven Bentley

Steven Bentley

GlobalFoundries - New York / United States
Others
AD Scientific Index ID: 5050641
person_outline Steven Bentley's MOST POPULAR ARTICLES
1-) Continuous flow in open microfluidics using controlled evaporation M Zimmermann, S Bentley, H Schmid, P Hunziker, E Delamarche Lab on a Chip 5 (12), 1355-1359, 2005 1102005
2-) Methods of forming vertical transistor devices with self-aligned top source/drain conductive contacts JH Zhang, C Radens, SJ Bentley, BA Cohen, KY Lim US Patent 9,530,866, 2016 852016
3-) Methods of forming nanosheet transistor with dielectric isolation of source-drain regions and related structureJ Frougier, MG Sung, R Xie, C Park, S BentleyUS Patent 9,947,804, 2018662018
4-) Methods of forming replacement gate structures and bottom and top source/drain regions on a vertical transistor deviceSJ Bentley, JH Zhang, KY Lim, H NiimiUS Patent 9,640,636, 2017622017
5-) Self-aligned gate-first VFETs using a gate spacer recessJH Zhang, KY Lim, SJ Bentley, C ParkUS Patent 9,536,793, 2017592017