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Steven E. Steen
ASML Holding - / Netherlands
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AD Scientific Index ID: 4966042
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Steven E. Steen's MOST POPULAR ARTICLES
1-)
Three-dimensional integrated circuits AW Topol, DC La Tulipe, L Shi, DJ Frank, K Bernstein, SE Steen, A Kumar, ... IBM Journal of Research and Development 50 (4.5), 491-506, 2006 8452006
2-)
Enabling SOI-based assembly technology for three-dimensional (3D) integrated circuits (ICs) AW Topol, DC La Tulipe, L Shi, SM Alam, DJ Frank, SE Steen, J Vichiconti, ... IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest …, 2005 3052005
3-)
Methods of forming wiring to transistor and related transistorDJ Frank, DC La Tulipe Jr, SE Steen, AW TopolUS Patent 7,666,723, 20102222010
4-)
Overlay as the key to drive wafer scale 3D integrationSE Steen, D LaTulipe, AW Topol, DJ Frank, K Belote, D PosillicoMicroelectronic engineering 84 (5-8), 1412-1415, 20072612007
5-)
Electrical characterization of germanium p-channel MOSFETsH Shang, H Okorn-Schimdt, J Ott, P Kozlowski, S Steen, EC Jones, ...IEEE Electron Device Letters 24 (4), 242-244, 20032102003
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