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Sumit Agarwal
AD Scientific Index 2024
Natural Sciences / Physics
Colorado School of Mines - Golden / United States
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Sumit Agarwal's MOST POPULAR ARTICLES
1-)
Mechanism of hydrogen-induced crystallization of amorphous siliconS Sriraman, S Agarwal, ES Aydil, D MaroudasNature 418 (6893), 62-65, 20024582002
2-)
The 2022 Plasma Roadmap: low temperature plasma science and technologyI Adamovich, S Agarwal, E Ahedo, LL Alves, S Baalrud, N Babaeva, ...Journal of Physics D: Applied Physics 55 (37), 373001, 20221152022
3-)
Surface reaction mechanisms during ozone and oxygen plasma assisted atomic layer deposition of aluminum oxideVR Rai, V Vandalon, S AgarwalLangmuir 26 (17), 13732-13735, 20101112010
4-)
Area-selective deposition of ruthenium by combining atomic layer deposition and selective etchingMFJ Vos, SN Chopra, MA Verheijen, JG Ekerdt, S Agarwal, WMM Kessels, ...Chemistry of Materials 31 (11), 3878-3882, 20191062019
5-)
Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlookRA Ovanesyan, EA Filatova, SD Elliott, DM Hausmann, DC Smith, ...Journal of Vacuum Science & Technology A 37 (6), 20191042019
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