Sun Jung Kim

Sun Jung Kim

Sungkyunkwan University - Seoul / South Korea
Others
AD Scientific Index ID: 4743530
성균관대학교
person_outline Sun Jung Kim's MOST POPULAR ARTICLES
1-) Atomic layer etching of SiO2 for surface cleaning using ammonium fluorosilicate with CF4/NH3 plasmaY Cho, Y Kim, S Kim, H ChaeJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 38 (2 …, 2020132020
2-) Sensitivity Enhancement of SiO2 Plasma Etching Endpoint Detection Using Modified Gaussian Mixture ModelS Lee, H Jang, Y Kim, SJ Kim, H ChaeIEEE Transactions on Semiconductor Manufacturing 33 (2), 252-257, 2020122020
3-) Flexible Al2O3/plasma polymer multilayer moisture barrier films deposited by a spatial atomic layer deposition processSJ Kim, SH Yong, YJ Choi, H Hwangbo, WY Yang, H ChaeJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 38 (2 …, 2020112020
4-) Improvement in the moisture barrier properties and flexibility by reducing hydrogen dangling bonds in SiNx thin films with plasma surface treatmentSJ Kim, SH Yong, HJ Ahn, Y Shin, H ChaeSurface and Coatings Technology 383, 125210, 202082020
5-) Flexible Carbon-rich Al2O3 Interlayers for Moisture Barrier Films by a Spatially-Resolved Atomic Layer Deposition ProcessSH Yong, SJ Kim, JS Park, SM Cho, HJ Ahn, H ChaeJournal of the Korean Physical Society 73, 40-44, 201872018