Sungmin Huh

Sungmin Huh

Samsung Electronics, South Korea - Gyeonggi / South Korea
Engineering & Technology / Electrical & Electronic Engineering
AD Scientific Index ID: 4439227
삼성전자, 한국
person_outline Sungmin Huh's MOST POPULAR ARTICLES
1-) Actinic extreme ultraviolet mask inspection beyond 0.25 numericalaperture Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
2-) A study of defects on EUV masks using blank inspection, patterned mask inspection, and wafer inspection Extreme ultraviolet (EUV) lithography 7636, 182-188, 2010
3-) Improving the performance of the Actinic Inspection Tool with an optimized alignment procedure Alternative Lithographic Technologies 7271, 590-600, 2009
4-) Printability and inspectability of programmed pit defects on the masks in EUV lithography Extreme Ultraviolet (EUV) Lithography 7636, 434-442, 2010
5-) Particle removal challenges of EUV patterned masks for the sub-22nm HP node Extreme Ultraviolet (EUV) Lithography 7636, 210-220, 2010