Swayambhu P Behera

Swayambhu P Behera

University of North Texas - Denton / United States
Engineering & Technology / Metallurgical & Materials Engineering
AD Scientific Index ID: 4313117
person_outline Swayambhu P Behera's MOST POPULAR ARTICLES
1-) Ultra-conformal carbon film depositionSP Behera, S Shaikh, P Manna, MB Pandit, T Summan, P Reilly, D Padhi, ...US Patent 9,721,784, 2017852017
2-) Oxygen radical and plasma damage of low- organosilicate glass materials: Diffusion-controlled mechanism for carbon depletionMA Goldman, DB Graves, GA Antonelli, SP Behera, JA KelberJournal of Applied Physics 106 (1), 013311, 2009802009
3-) Fundamental mechanisms of oxygen plasma-induced damage of ultralow- organosilicate materials: The role of thermal atomic oxygenM Chaudhari, J Du, S Behera, S Manandhar, S Gaddam, J KelberApplied Physics Letters 94 (20), 204102, 2009462009
4-) Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition systemZJ Ye, IIJD Pinson, H Hanawa, J Zhou, X Lin, RG Duan, KD Lee, BH Kim, ...US Patent 10,403,535, 2019292019
5-) Photo-induced site-specific nitridation of plasma-deposited B10C2Hx films: A new pathway toward post-deposition doping of semiconducting boron carbidesS Behera, J Wilks, PA Dowben, MS Driver, AN Caruso, JA KelberSurface science 604 (21-22), L51-L54, 2010192010