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Theo Panagopoulos
Lam Research Corp. - / United States
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AD Scientific Index ID: 4995282
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Theo Panagopoulos's MOST POPULAR ARTICLES
1-)
Mid-chamber gas distribution plate, tuned plasma flow control grid and electrode AM Paterson, JP Holland, T Panagopoulos, EP Hammond, BK Hatcher, ... US Patent App. 11/998,468, 2008 5182008
2-)
Process for selectively etching dielectric layers CL Hsieh, J Yuan, H Chen, T Panagopoulos, Y Ye US Patent 6,905,968, 2005 2412005
3-)
Plasma process employing multiple zone gas distribution for improved uniformity of critical dimension bias D Katz, D Palagashvili, BK Hatcher, T Panagopoulos, VN Todorow, ... US Patent App. 12/143,146, 2009 2272009
4-)
Substrate processing with rapid temperature gradient controlA Matyushkin, D Katz, J Holland, T Panagopoulos, MD WillwerthUS Patent 9,275,887, 20162112016
5-)
Substrate support with electrostatic chuck having dual temperature zonesA Matyushkin, D Koosau, T Panagopoulos, J HollandUS Patent 8,226,769, 20121982012
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