Timo Hatanpää

Timo Hatanpää

University of Helsinki - Helsinki / Finland
Natural Sciences / Chemical Sciences
AD Scientific Index ID: 1657787
Helsingin yliopisto
person_outline Timo Hatanpää's MOST POPULAR ARTICLES
1-) Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction … US Patent 10,731,249, 2020
2-) Methods of forming a transition metal containing film on a substrate by a cyclical deposition process US Patent 11,390,946, 2022
3-) Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction … US Patent 12,173,402, 2024
4-) Synthesis and use of precursors for ALD of group VA element containing thin films US Patent 9,315,896, 2016
5-) Synthesis and use of precursors for ALD of group VA element containing thin filmsV Pore, T Hatanpää, M Ritala, M LeskeläUS Patent 9,315,896, 20162702016