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Timothy A. Brunner
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Timothy A. Brunner's MOST POPULAR ARTICLES
1-)
Elastic relationships in layered composite media with approximation for the case of thin films on a thick substrate PH Townsend, DM Barnett, TA Brunner Journal of Applied Physics 62 (11), 4438-4444, 1987 4971987
2-)
Impact of lens aberrations on optical lithography TA Brunner IBM Journal of Research and Development 41 (1.2), 57-67, 1997 2321997
3-)
Optical metrology tool and method of using same CP Ausschnitt, TA Brunner US Patent 6,130,750, 2000 1912000
4-)
Focus and overlay characterization and optimization for photolithographic exposureTA BrunnerUS Patent 4,929,083, 19901821990
5-)
Approximate models for resist processing effectsTA Brunner, RA FergusonOptical Microlithography IX 2726, 198-207, 19961711996
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