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Tobias Zengerle
Universität des Saarlandes - Saarbrücken / Germany
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AD Scientific Index ID: 6048908
Saarland University
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Tobias Zengerle's MOST POPULAR ARTICLES
1-)
Optical and structural properties of aluminium nitride thin-films synthesized by DC-magnetron sputtering technique at different sputtering pressuresA Ababneh, AMK Dagamseh, Z Albataineh, M Tantawi, QM Al-Bataineh, ...Microsystem Technologies 27 (8), 3149-3159, 2021152021
2-)
Optical characterization of sputtered aluminum nitride thin films–correlating refractive index with degree of c-axis orientationA Ababneh, Z Albataineh, AMK Dagamseh, IS Al-Kofahi, B Schäfer, ...Thin Solid Films 693, 137701, 2020142020
3-)
Using the nonlinear Duffing effect of piezoelectric micro-oscillators for wide-range pressure sensingT Zengerle, M Stopp, A Ababneh, H SeidelActuators 10 (8), 172, 202162021
4-)
Modeling the damping mechanism of MEMS oscillators in the transitional flow regime with thermal wavesT Zengerle, J Joppich, P Schwarz, A Ababneh, H SeidelSensors and Actuators A: Physical 311, 112068, 202062020
5-)
Polyatomic degrees of freedom and their temporal evolution extracted from the damping of micro-oscillatorsT Zengerle, J Joppich, P Schwarz, A Ababneh, H SeidelSensors and Actuators A: Physical 297, 111460, 201962019
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