Tom Blomberg

Tom Blomberg

Aalto University - Espoo / Finland
Others
AD Scientific Index ID: 926132
Aalto-yliopisto
person_outline Tom Blomberg's MOST POPULAR ARTICLES
1-) Metal silicide, metal germanide, methods for making the sameVJ Pore, SP Haukka, TE Blomberg, EE ToisUS Patent 9,129,897, 20153612015
2-) Methods for depositing nickel films and for making nickel silicide and nickel germanideVJ Pore, SP Haukka, TE Blomberg, EE ToisUS Patent 9,379,011, 20163142016
3-) Selective deposition on metal or metallic surfaces relative to dielectric surfacesSP Haukka, RH Matero, E Färm, TE BlombergUS Patent 10,428,421, 20194412019
4-) Atomic layer deposition of antimony oxide filmsRH Matero, L Lindroos, H Sprey, JW Maes, D De Roest, D Pierreux, ...US Patent 9,006,112, 20155102015
5-) Method of pulsing vapor precursors in an ALD reactorTE BlombergUS Patent 7,846,499, 20105062010