Tsuyoshi Moriya

Tsuyoshi Moriya

Tokyo Electron - Tokyo / Japan
Others
AD Scientific Index ID: 4969864
東京エレクトロン
person_outline Tsuyoshi Moriya's MOST POPULAR ARTICLES
1-) Particle removal method for a substrate transfer mechanism and apparatus T Moriya, H Nakayama, K Okuyama, M Shimada US Patent 7,748,138, 2010 2022010
2-) Atmospheric transfer chamber, processed object transfer method, program for performing the transfer method, and storage medium storing the program T Moriya, T Hirooka, A Shimizu, S Tanaka US Patent App. 11/376,163, 2006 1182006
3-) Reduction of particle contamination in plasma-etching equipment by dehydration of chamber wallN Ito, T Moriya, F Uesugi, M Matsumoto, S Liu, Y KitayamaJapanese journal of applied physics 47 (5R), 3630, 20081022008
4-) Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particlesN Ito, F Uesugi, T MoriyaUS Patent 6,184,489, 20011022001
5-) Internal member of a plasma processing vesselK Mitsuhashi, H Nakayama, N Nagayama, T Moriya, H NagaikeUS Patent 7,780,786, 2010992010