Ulrich Mescheder

Ulrich Mescheder

Hochschule Furtwangen - Furtwangen / Germany
Engineering & Technology / Nanoscience and Nanotechnology
AD Scientific Index ID: 1759274
Furtwangen University of Applied Sciences
person_outline Ulrich Mescheder's MOST POPULAR ARTICLES
1-) Porous silicon-based humidity sensor with interdigital electrodes and internal heatersP Fürjes, A Kovacs, C Dücso, M Adam, B Müller, U MeschederSensors and Actuators B: Chemical 95 (1-3), 140-144, 20031162003
2-) MikrosystemtechnikU MeschederAuflage, Teubner, 6, 20041102004
3-) Local laser bonding for low temperature budgetUM Mescheder, M Alavi, K Hiltmann, C Lietzau, C Nachtigall, ...Sensors and Actuators A: Physical 97, 422-427, 2002862002
4-) Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systemsU Mescheder, B Müller, S Baborie, P UrbanovicJournal of Micromechanics and Microengineering 19 (9), 094003, 2009602009
5-) Micromechanical inclinometerU Mescheder, S MajerSensors and Actuators A: Physical 60 (1-3), 134-138, 1997481997