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Vadim Banine's MOST POPULAR ARTICLES
1-)
Lithographic apparatus and device manufacturing method JT De Smit, VY Banine, THJ Bisschops, MMTM Dierichs, TM Modderman US Patent 7,684,008, 2010 6462010
2-)
Lithographic apparatus and device manufacturing method JT De Smit, VY Banine, THJ Bisschops, TM Modderman, MMTM Dierichs US Patent 7,317,504, 2008 1972008
3-)
Signal integrity analysis systemA Alani, T Ngo, P MorrinUS Patent App. 10/103,508, 20031312003
4-)
Plasma sources for EUV lithography exposure toolsV Banine, R MoorsJournal of Physics D: Applied Physics 37 (23), 3207, 20041382004
5-)
Extreme ultraviolet lithography: Status and prospectsJ Benschop, V Banine, S Lok, E LoopstraJournal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 20081012008
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