Väino Sammelselg

Väino Sammelselg

University of Tartu - Tartu / Estonia
Natural Sciences / Chemical Sciences
AD Scientific Index ID: 1442171
Тартуский университет
person_outline Väino Sammelselg's MOST POPULAR ARTICLES
1-) Influence of substrate temperature on atomic layer growth and properties of HfO2 thin filmsJ Aarik, A Aidla, AA Kiisler, T Uustare, V SammelselgThin Solid Films 340 (1-2), 110-116, 19994551999
2-) Effect of crystal structure on optical properties of TiO2 films grown by atomic layer depositionJ Aarik, A Aidla, AA Kiisler, T Uustare, V SammelselgThin Solid Films 305 (1-2), 270-273, 19974031997
3-) Morphology and structure of TiO2 thin films grown by atomic layer depositionJ Aarik, A Aidla, T Uustare, V SammelselgJournal of crystal growth 148 (3), 268-275, 19954031995
4-) Texture development in nanocrystalline hafnium dioxide thin films grown by atomic layer depositionJ Aarik, A Aidla, H Mändar, V Sammelselg, T UustareJournal of Crystal Growth 220 (1-2), 105-113, 20002952000
5-) Atomic layer deposition of iridium thin filmsT Aaltonen, M Ritala, V Sammelselg, M LeskeläJournal of The Electrochemical Society 151 (8), G489, 20042102004