Vamsi K Devarapalli

Vamsi K Devarapalli

IBM Corporation - New York / United States
Engineering & Technology / Electrical & Electronic Engineering
AD Scientific Index ID: 4892254
person_outline Vamsi K Devarapalli's MOST POPULAR ARTICLES
1-) Synergistic roles of dodecyl sulfate and benzotriazole in enhancing the efficiency of CMP of copper Y Hong, VK Devarapalli, D Roy, SV Babu Journal of The Electrochemical Society 154 (6), H444, 2007 862007
2-) Reverse selectivity–High silicon nitride and low silicon dioxide removal rates using ceria abrasive-based dispersions PR Veera Dandu, VK Devarapalli, SV Babu Journal of colloid and interface science 347 (2), 267-276, 2010 372010
3-) Abrasive compositions for chemical mechanical polishing and methods for using same SV Babu, P Dandu, VK Devarapalli, G Crinière, C Pitois US Patent 8,366,959, 2013 232013
4-) Abrasive compositions for chemical mechanical polishing and methods for using sameSV Babu, P Dandu, VK Devarapalli, G Crinière, C PitoisUS Patent 8,366,959, 2013272013
5-) Post-chemical mechanical polishing cleaning of silicon wafers with laser-induced plasmaVK Devarapalli, Y Li, C CetinkayaJournal of adhesion science and technology 18 (7), 779-794, 2004242004