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Vivek Kumar Jain
ASML Holding - / Netherlands
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AD Scientific Index ID: 5644161
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Vivek Kumar Jain's MOST POPULAR ARTICLES
1-)
A new paradigm for in-line detection and control of patterning defectsS Hunsche, M Jochemsen, V Jain, X Zhou, F Chen, V Vellanki, C Spence, ...Metrology, Inspection, and Process Control for Microlithography XXIX 9424 …, 2015312015
2-)
Process Window Optimizer for pattern based defect prediction on 28nm Metal LayerP Fanton, R La Greca, V Jain, C Prentice, JG Simiz, S Hunsche, ...Metrology, Inspection, and Process Control for Microlithography XXX 9778 …, 201692016
3-)
A study on the automation of scanner matchingY He, A Serebryakov, S Light, V Jain, E Byers, R Goossens, ZY Niu, ...Optical Microlithography XXVI 8683, 271-281, 201392013
4-)
Methods for defect validationS Hunsche, RA LASO, VK Jain, M Jochemsen, X ZhouUS Patent App. 15/580,515, 201842018
5-)
Process variability aware adaptive inspection and metrologyV Vellanki, VK Jain, S HunscheUS Patent 11,003,093, 202132021
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