Xin Meng

Xin Meng

University of Texas Dallas - Richardson / United States
Engineering & Technology / Electrical & Electronic Engineering
AD Scientific Index ID: 4847062
The University of Texas at Dallas
person_outline Xin Meng's MOST POPULAR ARTICLES
1-) Atomic Layer Deposition of Silicon Nitride Thin Films: A Review of Recent Progress, Challenges, and OutlooksX Meng, YC Byun, HS Kim, JS Lee, AT Lucero, L Cheng, J KimMaterials 9 (12), 1007, 2016962016
2-) Low temperature synthesis of graphite on Ni films using inductively coupled plasma enhanced CVDL Cheng, K Yun, A Lucero, J Huang, X Meng, G Lian, HS Nam, ...Journal of Materials Chemistry C 3 (20), 5192-5198, 2015362015
3-) Hierarchical Porous Carbon Arising from Metal–Organic Framework-Encapsulated Bacteria and Its Energy Storage PotentialS Li, Xiaoshuang, ZZ Chen, FC Herbert, R Jayawickramage, ...ACS Appl. Mater. Interfaces 12 (10), 11884-11889, 2020302020
4-) Investigation of the Physical Properties of Plasma Enhanced Atomic Layer Deposited Silicon Nitride as Etch StopperHS Kim, X Meng, SJ Kim, AT Lucero, L Cheng, YC Byun, JS Lee, ...ACS applied materials & interfaces 10 (51), 44825–44833, 2018332018
5-) Hollow Cathode Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using PentachlorodisilaneX Meng, HS Kim, AT Lucero, SM Hwang, JS Lee, YC Byun, J Kim, ...ACS Appl. Mater. Interfaces 10 (16), 14116−14123, 2018332018