Yongjhin Cho

Yonsei University - Seoul / South Korea

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AD Scientific Index ID: 6101895

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Yongjhin Cho's MOST POPULAR ARTICLES

1-) Substrate treatment systems using supercritical fluidY Cho, Y Ko, K Kim, K Kim, S Kim, J Oh, K Lee, J Wonho, Y JunUS Patent 9,027,576, 2015172015

2-) Apparatus and methods for treating a substrateH Lee, Y Ko, K Kim, K Kim, S Kim, K Lee, Y Jun, Y ChoUS Patent 9,534,839, 2017152017

3-) Real time analysis of the Haze environment trapped between the pellicle film and the mask surfaceJ Choi, S Lee, Y Cho, S Ji, BC Cha, SW Choi, WS HanPhotomask and Next-Generation Lithography Mask Technology XIII 6283, 52-58, 2006122006

4-) Substrate processing method and substrate processing system for performing the sameY Cho, K Lee, YH Kim, JW Lee, SW Bae, J OhUS Patent 8,795,541, 2014112014

5-) Substrate treating apparatusS Kim, Y Jun, Y Ko, K Kim, J Oh, K Lee, J Jeong, Y ChoUS Patent 9,627,233, 2017102017

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