Youngmin Park

Youngmin Park

Chung Ang University - Multan / South Korea
Engineering & Technology / Electrical & Electronic Engineering
AD Scientific Index ID: 4858530
중앙대학교
person_outline Youngmin Park's MOST POPULAR ARTICLES
1-) Effect on plasma and etch-rate uniformity of controlled phase shift between rf voltages applied to powered electrodes in a triode capacitively coupled plasma reactorD Sung, S Jeong, Y Park, VN Volynets, AG Ushakov, GH KimJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 27 (1 …, 2009312009
2-) Plasma generating apparatusSJ Jeon, Y Tolmachev, SH Lee, SH Seok, YM Park, WH JangUS Patent 8,169,148, 2012222012
3-) Method of Forming an Epitaxial Layer and Apparatus for Processing a Substrate Used for the MethodTK Hong, Y Park, HW Oh, J Choi, SC HanUS Patent App. 14/520,768, 201532015
4-) Plasma Processing ApparatusJHL YM Park, YH Lim, JS LeeKR Patent 101208408B1, 20102010
5-) Wafer Transferring apparatus and transferring method thereofHRP Youngmin Park, Dongchul Kim, DH Namgung, NJ ParkKR Patent App. 100676823B1, 20052005