Yuki Shimizu

Yuki Shimizu

Tohoku University - Sendai / Japan
Others
AD Scientific Index ID: 421493
東北大学
person_outline Yuki Shimizu's MOST POPULAR ARTICLES
1-) A six-degree-of-freedom surface encoder for precision positioning of a planar motion stageX Li, W Gao, H Muto, Y Shimizu, S Ito, S DianPrecision Engineering 37 (3), 771-781, 20131542013
2-) A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurementA Kimura, W Gao, WJ Kim, K Hosono, Y Shimizu, L Shi, L ZengPrecision engineering 36 (4), 576-585, 20121122012
3-) A three-axis autocollimator for detection of angular error motions of a precision stageW Gao, Y Saito, H Muto, Y Arai, Y ShimizuCIRP annals 60 (1), 515-518, 2011892011
4-) An insight into optical metrology in manufacturingY Shimizu, LC Chen, DW Kim, X Chen, X Li, H MatsukumaMeasurement Science and Technology 32 (4), 042003, 2021982021
5-) Design and construction of the motion mechanism of an XY micro-stage for precision positioningY Shimizu, Y Peng, J Kaneko, T Azuma, S Ito, W Gao, TF LuSensors and Actuators A: Physical 201, 395-406, 2013752013