Yukio Suzuki|鈴木　裕輝夫

Yukio Suzuki|鈴木　裕輝夫

Tohoku University - Sendai / Japan
Others
AD Scientific Index ID: 5790795
東北大学
person_outline Yukio Suzuki|鈴木　裕輝夫's MOST POPULAR ARTICLES
1-) Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon viasY Hata, Y Suzuki, M Muroyama, T Nakayama, Y Nonomura, R Chand, ...Sensors and Actuators A: Physical 273, 30-41, 2018292018
2-) 300 μm Deep through silicon via in laser-ablated CMOS multi-project wafer for cost-effective development of integrated MEMSY Suzuki, H Fukushi, M Muroyama, Y Hata, T Nakayama, R Chand, ...2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017152017
3-) Low-stress epitaxial polysilicon process for micromirror devicesY Suzuki, K Totsu, H Watanabe, M Moriyama, M Esashi, S TanakaIEEJ Transactions on Sensors and Micromachines 133 (6), 223-228, 2013132013
4-) Free-standing subwavelength grid infrared cut filter of 90 mm diameter for LPP EUV light sourceY Suzuki, K Totsu, M Moriyama, M Esashi, S TanakaSensors and Actuators A: Physical 231, 59-64, 2015122015
5-) Silicon migration seal wafer‐level vacuum encapsulation (TRANSLATED PAPER)Y Suzuki, V Dupuit, T Kojima, Y Kanamori, S TanakaElectronics and Communications in Japan 104 (1), 120-125, 202192021