Yulu Chen

Yulu Chen

Xi'an Shiyou University - Xi'an / China
Others
AD Scientific Index ID: 4507426
西安石油大学
person_outline Yulu Chen's MOST POPULAR ARTICLES
1-) Application of EUV resolution enhancement techniques (RET) to optimize and extend single exposure bi-directional patterning for 7nm and beyond logic designsRH Kim, O Wood, M Crouse, Y Chen, V Plachecki, S Hsu, K GronlundExtreme Ultraviolet (EUV) Lithography VII 9776, 503-512, 2016232016
2-) Comparison of left and right side line edge roughness in lithographyL Sun, N Saulnier, G Beique, E Verduijn, W Wang, Y Xu, H Tang, Y Chen, ...Metrology, Inspection, and Process Control for Microlithography XXX 9778 …, 2016212016
3-) Thin absorber extreme ultraviolet photomask based on Ni–TaN nanocomposite materialD Hay, P Bagge, I Khaw, L Sun, O Wood, Y Chen, R Kim, ZJ Qi, Z ShiOptics Letters 41 (16), 3791-3794, 2016192016
4-) Line edge roughness frequency analysis for SAQP processL Sun, X Zhang, S Levi, A Ge, H Zhou, W Wang, N Krishnan, Y Chen, ...Optical Microlithography XXIX 9780, 247-252, 2016192016
5-) SAV using selective SAQP/SADPW Wang, RRH Kim, L Sun, E Verduijn, Y ChenUS Patent 9,478,462, 2016182016