Citation Rankings
Highly Cited Researchers
ASML Holding Highly Cited Researchers Citation Rankings 2025
The Citation Rankings (Highly Cited Researchers) highlight the most cited and influential researchers across a vast range of scientific fields, covering 197 main and sub-disciplines, including the Art and Humanities Citation Rankings and Social Sciences and Humanities Citation Rankings. This service, offered exclusively by AD Scientific Index, aims to provide a balanced perspective by excluding data from CERN and other statistical sources that disproportionately favor certain researchers, particularly in the social sciences and humanities. This unique approach addresses the advantages researchers with multi-author publications and CERN involvement hold over others. Furthermore, citation rankings help uncover rule violations and unethical practices within the research community. For more detailed citation analyses, explore the Scientists Last 6 Years Citation Index, Universities Total Citations Rankings 2025, and Universities Last 6 Years Citations Rankings 2025.
* Total Citation Counts Rankings
Ranking Based On Selection :1
EUV
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
6,161
1,867
0.303
* Total Citation Counts Rankings
Ranking Based On Selection :2
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
6,097
1,353
0.222
* Total Citation Counts Rankings
Ranking Based On Selection :3
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
5,930
1,586
0.267
* Total Citation Counts Rankings
Ranking Based On Selection :4
Microlithography for integrated circuit production
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
5,777
667
0.115
* Total Citation Counts Rankings
Ranking Based On Selection :5
Correlated electron systems
Lithography
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
5,339
1,943
0.364
* Total Citation Counts Rankings
Ranking Based On Selection :6
photonics
nanotechnology
optics
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
4,769
691
0.145
* Total Citation Counts Rankings
Ranking Based On Selection :7
Thin films
optical modeling
interference coatings
Nano science and technology
Nano catalysis
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
4,376
2,406
0.550
* Total Citation Counts Rankings
Ranking Based On Selection :8
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
4,329
1,690
0.390
* Total Citation Counts Rankings
Ranking Based On Selection :9
IoT
connectivity
sensors
sensor fusion
innovation management
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
4,247
1,472
0.347
* Total Citation Counts Rankings
Ranking Based On Selection :10
materials science
patterning
devices
systems
life sciences
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,981
1,326
0.333
* Total Citation Counts Rankings
Ranking Based On Selection :11
photolithography
simulation
photoresist
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,600
616
0.171
* Total Citation Counts Rankings
Ranking Based On Selection :12
Lithography
Metrology
Photomasks
Amorphous Materials
Polymer Chemistry/Dynamics
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,214
342
0.106
* Total Citation Counts Rankings
Ranking Based On Selection :13
lithography
patterning
voltage contrast
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,142
2,112
0.672
* Total Citation Counts Rankings
Ranking Based On Selection :14
lithography
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,094
426
0.138
* Total Citation Counts Rankings
Ranking Based On Selection :15
Nanophotonics
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,067
2,597
0.847
* Total Citation Counts Rankings
Ranking Based On Selection :16
Optical Communications
optical detection
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,059
1,118
0.365
* Total Citation Counts Rankings
Ranking Based On Selection :17
physical chemistry
nanotechnology
laser spectroscopy
cancer research and drug delivery
EUV
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,005
1,209
0.402
* Total Citation Counts Rankings
Ranking Based On Selection :18
Electrochemistry
Physicochemistry
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,821
2,281
0.809
* Total Citation Counts Rankings
Ranking Based On Selection :19
Lithography
3D integration
semiconductors
process
photovoltaics
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,768
779
0.281
* Total Citation Counts Rankings
Ranking Based On Selection :20
Fluid Mechanics
CFD
Renewable Energy
Flow Control
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,749
2,443
0.889
* Total Citation Counts Rankings
Ranking Based On Selection :21
comsol
matlab
simulink
modeling
simulation
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,609
1,166
0.447
* Total Citation Counts Rankings
Ranking Based On Selection :22
Quantum Coherent Control
Ultrafast Nonlinear Optics
Photonic Crystal Fibres
Coherent Raman Interaction
Spectroscopy
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,607
1,386
0.532
* Total Citation Counts Rankings
Ranking Based On Selection :23
EUV
Lithography
Plasma
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,562
1,189
0.464
* Total Citation Counts Rankings
Ranking Based On Selection :24
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,557
864
0.338
* Total Citation Counts Rankings
Ranking Based On Selection :25
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,435
1,666
0.684
* Total Citation Counts Rankings
Rankings
166,961
4,002
1
Ranking Based On Selection: 1
Vadim Banine
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
6,161
1,867
0.303
* Total Citation Counts Rankings
Rankings
168,710
4,032
2
Ranking Based On Selection: 2
Stefan Hunsche
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
6,097
1,353
0.222
* Total Citation Counts Rankings
Rankings
173,398
4,116
3
Ranking Based On Selection: 3
Liang Wang
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
5,930
1,586
0.267
* Total Citation Counts Rankings
Rankings
177,929
4,214
4
Ranking Based On Selection: 4
Timothy A. Brunner
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
5,777
667
0.115
* Total Citation Counts Rankings
Rankings
192,190
4,500
5
Ranking Based On Selection: 5
Wolter Siemons
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
5,339
1,943
0.364
* Total Citation Counts Rankings
Rankings
214,449
4,929
6
Ranking Based On Selection: 6
Se-Heon Kim
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
4,769
691
0.145
photonics
nanotechnology
optics
* Total Citation Counts Rankings
Rankings
232,318
5,255
7
Ranking Based On Selection: 7
Farzad Fareed|Farzad Behafarid
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
4,376
2,406
0.550
Thin films
optical modeling
interference coatings
Nano science and technology
Nano catalysis
* Total Citation Counts Rankings
Rankings
234,668
5,294
8
Ranking Based On Selection: 8
Michael Engel
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
4,329
1,690
0.390
* Total Citation Counts Rankings
Rankings
238,881
5,363
9
Ranking Based On Selection: 9
Harmke De Groot
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
4,247
1,472
0.347
IoT
connectivity
sensors
sensor fusion
innovation management
* Total Citation Counts Rankings
Rankings
253,524
5,613
10
Ranking Based On Selection: 10
Qinghuang Lin
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,981
1,326
0.333
materials science
patterning
devices
systems
life sciences
* Total Citation Counts Rankings
Rankings
276,688
6,045
11
Ranking Based On Selection: 11
Steven G. Hansen
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,600
616
0.171
* Total Citation Counts Rankings
Rankings
304,895
6,567
12
Ranking Based On Selection: 12
Christopher Spence
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,214
342
0.106
Lithography
Metrology
Photomasks
Amorphous Materials
Polymer Chemistry/Dynamics
* Total Citation Counts Rankings
Rankings
310,599
6,667
13
Ranking Based On Selection: 13
Achim Woessner
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,142
2,112
0.672
* Total Citation Counts Rankings
Rankings
314,678
6,724
14
Ranking Based On Selection: 14
Robert Socha
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,094
426
0.138
* Total Citation Counts Rankings
Rankings
316,882
6,758
15
Ranking Based On Selection: 15
Yuanqing Yang
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,067
2,597
0.847
* Total Citation Counts Rankings
Rankings
317,642
6,771
16
Ranking Based On Selection: 16
Jingshi Li
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,059
1,118
0.365
* Total Citation Counts Rankings
Rankings
322,284
6,836
17
Ranking Based On Selection: 17
Viktor Chikan
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
3,005
1,209
0.402
physical chemistry
nanotechnology
laser spectroscopy
cancer research and drug delivery
EUV
* Total Citation Counts Rankings
Rankings
339,247
7,114
18
Ranking Based On Selection: 18
Isis Ledezma-Yanez
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,821
2,281
0.809
* Total Citation Counts Rankings
Rankings
344,547
7,206
19
Ranking Based On Selection: 19
Steven E. Steen
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,768
779
0.281
Lithography
3D integration
semiconductors
process
photovoltaics
* Total Citation Counts Rankings
Rankings
346,422
7,236
20
Ranking Based On Selection: 20
Rahim Rezaeiha
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,749
2,443
0.889
Fluid Mechanics
CFD
Renewable Energy
Flow Control
* Total Citation Counts Rankings
Rankings
361,288
7,488
21
Ranking Based On Selection: 21
Awm (Jos) Van Schijndel
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,609
1,166
0.447
* Total Citation Counts Rankings
Rankings
361,479
7,492
22
Ranking Based On Selection: 22
Amir Abdolvand
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,607
1,386
0.532
Quantum Coherent Control
Ultrafast Nonlinear Optics
Photonic Crystal Fibres
Coherent Raman Interaction
Spectroscopy
* Total Citation Counts Rankings
Rankings
366,355
7,580
23
Ranking Based On Selection: 23
Mark Van De Kerkhof|M van de Kerkhof, Marcus van de Kerkhof, Marcus Adrianus van de Kerkhof
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,562
1,189
0.464
* Total Citation Counts Rankings
Rankings
366,920
7,586
24
Ranking Based On Selection: 24
Ws Christian Roelofs
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,557
864
0.338
* Total Citation Counts Rankings
Rankings
380,971
7,781
25
Ranking Based On Selection: 25
Ilias Katsouras
Citation Metrics
Total
Last 6 Years
Last 6 Years / Total
2,435
1,666
0.684